TAIPEI (Taiwan News) — One Taiwan Semiconductor Manufacturing Co. (TSMC) backend fab in Zhunan Science Park in Miaoli County was partially closed after an earthquake on Wednesday (April 3).

Hsinchu Science Park Bureau (HSPB) said that TSMC and Powerchip Semiconductor Manufacturing Corporation (PSMC) in Zhunan Science Park were partially shut down over preventative measures, reported CNA. TSMC, PSMC, Innolux, and Epistor also ordered personnel evacuations at their Zhunan facilities, per UDN.

PSMC reported no injuries and was still checking for equipment damage. King Yuan Electronics also reported no personnel injuries.

As for Hsinchu Science Park, the HSPB said there were no abnormalities in electricity, water, and sewage.

TSMC, the world's largest contract chipmaker, operates seven fabs in Hsinchu Science Park and one backend fab in Zhunan Science Park.

A magnitude 7.2 earthquake struck Taiwan at 7:58 a.m. on Wednesday in the northeast. The epicenter was 25 km south-southeast of Hualien County Hall.